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http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1653| Micro-hole drilling in thin films with cw low power lasers | |
| JULIO CESAR RAMIREZ SAN JUAN JUAN PABLO PADILLA MARTINEZ Plácido Zaca Morán RUBEN RAMOS GARCIA | |
| Acceso Abierto | |
| Atribución-NoComercial-SinDerivadas | |
| Laser materials processing Thermal effects Damage Microstructure fabrication Micro-optical devices | |
| In this work, we perform drilling of micro-holes and micro-patterning in indium tin oxide (ITO) and titanium thin films. In ITO films the drilling is performed by thermocavitation only; meanwhile in titanium two competing processes are identified: (i) laser-induced sublimation producing high-quality micro-holes comparable to those produced with femtosecond pulses but at a reduced cost and (ii) erosion by thermocavitation which tend to degrade the quality of the micro-holes. The micro-holes can be employed as micrometer light sources for use in point-diffraction interferometers or spatial filters; in addition, micron-sized resolution patterning can be performed. | |
| Optical Materials Express | |
| 01-08-2011 | |
| Artículo | |
| Inglés | |
| Estudiantes Investigadores Público en general | |
| Ramirez San Juan, J. C., et al., (2011), Micro-hole drilling in thin films with cw low power lasers, Optical Materials Express. Vol. 1(4):598-604 | |
| ÓPTICA | |
| Versión aceptada | |
| acceptedVersion - Versión aceptada | |
| Aparece en las colecciones: | Artículos de Óptica |
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| 28 Ramirez_2011_OptMatEx1-598.pdf | 1.08 MB | Adobe PDF | Visualizar/Abrir |