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Electrical characterization of planarized a-SiGe:H Thin-film Transistors
Miguel Dominguez
Pedro Rosales Quintero
ALFONSO TORRES JACOME
Acceso Abierto
Atribución-NoComercial-SinDerivadas
Thin-film transistor
Hydrogenated amorphous silicon–Germanium
Low-temperature
Spin-on glass
Spice
In this work the electrical characterization of n-channel a-SiGe:H TFTs with planarized gate electrode is presented. The planarized a-SiGe:H TFTs were fabricated at 200°C on corning glass substrate. The devices exhibit a subthreshold slope of 0.56 V/Decade, an on/off-current ratio approximately of 10⁶ and off-current approximately of 0.3x10⁻¹² A. The results show an improvement of the electrical characteristics when are compared to those unplanarized devices fabricated at higher temperature. Moreover, the simulation of the device using a SPICE model is presented.
Revista Mexicana de Física
2013-01
Artículo
Inglés
Estudiantes
Investigadores
Público en general
Dominguez, M., et al., (2013). Electrical characterization of planarized a-SiGe:H Thin-film Transistors, Revista Mexicana de Física, Vol. 59(1):62–65
ELECTRÓNICA
Versión aceptada
acceptedVersion - Versión aceptada
Aparece en las colecciones: Artículos de Electrónica

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