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Electrical characterization of planarized a-SiGe:H Thin-film Transistors | |
Miguel Dominguez Pedro Rosales Quintero ALFONSO TORRES JACOME | |
Acceso Abierto | |
Atribución-NoComercial-SinDerivadas | |
Thin-film transistor Hydrogenated amorphous silicon–Germanium Low-temperature Spin-on glass Spice | |
In this work the electrical characterization of n-channel a-SiGe:H TFTs with planarized gate electrode is presented. The planarized a-SiGe:H TFTs were fabricated at 200°C on corning glass substrate. The devices exhibit a subthreshold slope of 0.56 V/Decade, an on/off-current ratio approximately of 10⁶ and off-current approximately of 0.3x10⁻¹² A. The results show an improvement of the electrical characteristics when are compared to those unplanarized devices fabricated at higher temperature. Moreover, the simulation of the device using a SPICE model is presented. | |
Revista Mexicana de Física | |
2013-01 | |
Artículo | |
Inglés | |
Estudiantes Investigadores Público en general | |
Dominguez, M., et al., (2013). Electrical characterization of planarized a-SiGe:H Thin-film Transistors, Revista Mexicana de Física, Vol. 59(1):62–65 | |
ELECTRÓNICA | |
Versión aceptada | |
acceptedVersion - Versión aceptada | |
Aparece en las colecciones: | Artículos de Electrónica |
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188. Electrical Characterization of Planarized a-SiGe -H Thin-Film Transistors.pdf | 2.18 MB | Adobe PDF | Visualizar/Abrir |