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Comparison of three un-cooled micro-bolometers configurations based on amorphous silicon–germanium thin films deposited by plasma
MARIO MORENO MORENO
ANDREY KOSAREV
ALFONSO TORRES JACOME
ROBERO CARLOS AMBROSIO LAZARO
Acceso Abierto
Atribución-NoComercial-SinDerivadas
Amorphous semiconductors
Germanium
Silicon
Sensors
We present a comparative study of three configurations of un-cooled micro-bolometers based on amorphous silicon–germanium thin films deposited by plasma at low temperature and compatible with the IC technology. The temperature dependence of conductivity δ(T), current–voltage characteristics I(U) and current noise spectral density (NSD) have been measured in order to characterize and compare the performance characteristics, such as responsivity and detectivity in three configurations of micro-bolometers: (a) planar structure with a silicon–germanium intrinsic (a-SixGey:H) thermo-sensing film; (b) planar structure with a silicon–germanium–boron alloy (a-Six-GeyBz:H) thermo-sensing film and (c) sandwich structure with an intrinsic (a-SixGey:H) thermo-sensing film. The samples studied demonstrated different cell resistance Rc = 105–108 X and responsivities R1 = 101–10-3 A/W, while the values of detectivity D* were quite similar D* = (4–7) X 109 cm Hz1/2 W-1.
Elsevier B.V.
2008
Artículo
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Público en general
Moreno-Moreno, M. , et al., (2008). Comparison of three un-cooled micro-bolometers configurations based on amorphous silicon–germanium thin films deposited by plasma, Journal of Non-Crystalline Solids (354): 2598–2602
ELECTRÓNICA
Versión aceptada
acceptedVersion - Versión aceptada
Appears in Collections:Artículos de Electrónica

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