Please use this identifier to cite or link to this item: http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1247
Microbolometers fabricated with surface micromachining with a-Si-Ge:H thermo-sensing films
MARIO MORENO MORENO
ANDREY KOSAREV
ALFONSO TORRES JACOME
ROBERTO AMBROSIO
Acceso Abierto
Atribución-NoComercial-SinDerivadas
Germanium
IR detectors
Plasma enhanced chemical vapor deposition
In this work we present the process flow for the fabrication of un-cooled IR detectors employing surface micro-machining techniques over silicon substrates. These detectors are based on thin films deposited by plasma at low temperatures. The thermo sensing film used is an intrinsic a-SixGe1-x:H film, which has demonstrated a very high temperature coefficient of resistance (TCR), and a moderated resistivity, these properties are better than those of the a-Si:H intrinsic film, which is commonly used in commercial IR devices. Two device configurations have been designed and fabricated, labeled planar and sandwich. The former is the configuration commonly used in commercial micro-bolometers, while the latter is proposed in order to reduce the high cell resistance observed in this kind of devices, without the necessity of doping the intrinsic film, which results in a decrement of the TCR and therefore in responsivity. Finally some performance characteristics of the devices studied are discussed in comparison with data reported in literature.
World Scientific Publishing Company
2008
Artículo
Inglés
Estudiantes
Investigadores
Público en general
Moreno-Moreno, M. , et al., (2008). Microbolometers fabricated with surface micromachining with a-Si-Ge:H thermo-sensing films, International Journal of High Speed Electronics and Systems Vol. 18, (4): 1045–1054
ELECTRÓNICA
Versión aceptada
acceptedVersion - Versión aceptada
Appears in Collections:Artículos de Electrónica

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