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Reliability characteristics of W-La2O3 structures compared with those of HfO2-based gate oxides
JOEL MOLINA REYES
FRANCISCO JAVIER DE LA HIDALGA WADE
PEDRO ROSALES QUINTERO
Acceso Abierto
Atribución-NoComercial-SinDerivadas
In this paper, we report and compare the reliability results obtained for W-La 2 O 3 gated Metal-Oxide-Semiconductor (MOS) devices with those of HfO 2-based systems reported in literature. Reliability issues like stress-induced leakage current (SILC), interface-states generation (Dit), threshold voltage shift (ΔVth) and time to breakdown (t bd) were compared and analyzed for both dielectrics in order to obtain a more specific assessment of their resistance to electrical degradation and breakdown.
IEEE
2008
Artículo
Inglés
Estudiantes
Investigadores
Público en general
J. Molina, et al., (2008). Reliability characteristics of W-La2O3 structures compared with those of HfO2-based gate oxides, IEEE (978-1-4244-2540-2/08): 1-4
ELECTRÓNICA
Versión aceptada
acceptedVersion - Versión aceptada
Aparece en las colecciones: Artículos de Electrónica

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