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http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1269| Photoconduction in silicon rich oxide films | |
| JORGE ALBERTO LUNA LOPEZ MARIANO ACEVES MIJARES ALFREDO MORALES SANCHEZ JOSE FRANCISCO JAVIER FLORES GRACIA GODOFREDO GARCIA SALGADO | |
| Acceso Abierto | |
| Atribución-NoComercial-SinDerivadas | |
| Photoconduction of silicon rich oxide (SRO) thin films were studied by current-voltage (I-V) measurements, where ultraviolet (UV) and white (Vis) light illumination were applied. SRO thin films were deposited by low pressure chemical vapour deposition (LPCVD) technique, using SiH4 (silane) and N2O (nitrous oxide) as reactive gases at 700 °. The gas flow ratio, Ro = [N2O]/[SiH4] was used to control the silicon excess. The thickness and refractive index of the SRO films were 72.0 nm, 75.5 nm, 59.1 nm, 73.4 nm and 1.7, 1.5, 1.46, 1.45, corresponding to Ro = 10, 20, 30 and 50, respectively. These results were obtained by null ellipsometry. Si nanoparticles (Si-nps) and defects within SRO films permit to obtain interesting photoelectric properties as a high photocurrent and photoconduction. These effects strongly depend on the silicon excess, thickness and structure type. Two different structures (Al/SRO/Si and Al/SRO/SRO/Si metal-oxide-semiconductor (MOS)-like structures) were fabricated and used as devices. The photocurrent in these structures is dominated by the generation of carriers due to the incident photon energies (~3.0-1.6 eV and 5 eV). These structures showed large photoconductive response at room temperature. Therefore, these structures have potential applications in optoelectronics devices. | |
| IOP Publishing | |
| 2009 | |
| Artículo | |
| Inglés | |
| Estudiantes Investigadores Público en general | |
| Luna-López, J.A., et al., (2009). Photoconduction in silicon rich oxide films, XIX Latin American Symposium on Solid State Physics (SLAFES XIX) Journal of Physics: Conference Series 167 (012017): 1-5 | |
| ELECTRÓNICA | |
| Versión aceptada | |
| acceptedVersion - Versión aceptada | |
| Aparece en las colecciones: | Artículos de Electrónica |
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