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Two-dimensional optical micro-scanner on silicon technology
GABRIELA MOLAR VELAZQUEZ
FRANCISCO JAVIER RENERO CARRILLO
WILFRIDO CALLEJA ARRIAGA
Acceso Abierto
Atribución-NoComercial-SinDerivadas
Optical design
Micro-mirrors
Micro-optical systems
Integrated optics
Oslo
A two-dimensional optical micro-scanner, which main components are two mobile flat and a concave micro-mirrors, is designed such that, all optical components can be fabricated on the same substratum. The optical parameters, which physical dimensions are between 50 and 500 μm, are obtained within the geometrical optics. The optical performance is evaluated by means of the MTF and Rayleigh resolution criteria, given 80% of modulation for a frequency of 8 cycles/mm with a Gaussian source, the resolution limit is 30 μm.
Elsevier Gm bH
2010
Artículo
Inglés
Estudiantes
Investigadores
Público en general
Molar-Velázquez, G., et al., (2010). Two-dimensional optical micro-scanner on silicon technology, Optik (121): 843–846
ELECTRÓNICA
Versión publicada
publishedVersion - Versión publicada
Aparece en las colecciones: Artículos de Electrónica

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