Please use this identifier to cite or link to this item: http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/899
Fabrication and performance comparison of planar and sandwich structures of micro-bolometers with Ge thermo-sensing layer
MARIO MORENO MORENO
ANDREY KOSAREV
ALFONSO TORRES JACOME
ROBERO CARLOS AMBROSIO LAZARO
Acceso Abierto
Atribución-NoComercial-SinDerivadas
Amorphous materials
Germanium
Silicon
Two types of micro-bolometer structures were fabricated with the same materials and fabrication process. The structures are labeled planar and sandwich types. Their performance was measured and a comparison was performed among these structures. Our results show that the sandwich type structure behaves better in terms of the voltage and current responsivity, but shows 2 to 3 orders of magnitude higher 1/f noise levels. In spite that the sandwich configuration shows a lower response time constant than that of the planar device, the noise level makes the detectivity of both devices practically the same.
Elsevier
Science Direct
2007-01
Artículo
Inglés
Estudiantes
Investigadores
Público en general
M. Moreno
A. Kosarev
A. Torres
R. Ambrosio
ELECTRÓNICA
Versión aceptada
acceptedVersion - Versión aceptada
Appears in Collections:Artículos de Electrónica

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