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Fabrication and performance comparison of planar and sandwich structures of micro-bolometers with Ge thermo-sensing layer | |
MARIO MORENO MORENO ANDREY KOSAREV ALFONSO TORRES JACOME ROBERO CARLOS AMBROSIO LAZARO | |
Acceso Abierto | |
Atribución-NoComercial-SinDerivadas | |
Amorphous materials Germanium Silicon | |
Two types of micro-bolometer structures were fabricated with the same materials and fabrication process. The structures are labeled planar and sandwich types. Their performance was measured and a comparison was performed among these structures. Our results show that the sandwich type structure behaves better in terms of the voltage and current responsivity, but shows 2 to 3 orders of magnitude higher 1/f noise levels. In spite that the sandwich configuration shows a lower response time constant than that of the planar device, the noise level makes the detectivity of both devices practically the same. | |
Elsevier Science Direct | |
2007-01 | |
Artículo | |
Inglés | |
Estudiantes Investigadores Público en general | |
M. Moreno A. Kosarev A. Torres R. Ambrosio | |
ELECTRÓNICA | |
Versión aceptada | |
acceptedVersion - Versión aceptada | |
Aparece en las colecciones: | Artículos de Electrónica |
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